感光性フィルムの製造方法

Manufacturing method for photosensitive film

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a photosensitive film that prevents the lowering in planarity of a supporter film in the drying process of a photosensitive film and enhances the productivity of the photosensitive film. <P>SOLUTION: This manufacturing method for the sensitive film comprises applying a photosensitive resin composition solution to the supporter film 10A at an application part 16 in the production line of a dry film resist 10 and evaporating a solvent in the photosensitive resin composition solution by spraying hot blast to the supporter film 10A at a drying part 18. The hot blast temperature at the drying part 18 is set so that the supporter film 10A in the drying part 18 becomes less than a heat shrinking boundary temperature. The heat shrinking boundary temperature refers to the temperature at which the changing ratio of the heat shrinking ratio of the supporter film 10A is distorted. <P>COPYRIGHT: (C)2006,JPO&NCIPI
【課題】 感光性フィルムの乾燥工程における支持体フィルムの平面性の低下を防止すると共に、感光性フィルムの生産性を向上する。 【解決手段】 ドライフィルムレジスト10の製造ラインでは、塗布部16で支持体フィルム10Aに感光性樹脂組成物溶液を塗布し、乾燥部18で支持体フィルム10Aに熱風を吹付けて感光性樹脂組成物溶液中の溶媒を蒸発させる。ここで、乾燥部18内での支持体フィルム10Aの温度が、熱収縮境界温度未満となるように、乾燥部18の熱風温度を設定する。この熱収縮境界温度とは、支持体フィルム10Aの熱収縮率の変化率が変曲する温度である。 【選択図】 図1

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